Journal of Micro/Nanolithography, MEMS, and MOEMS
| ISSN: | 1932-5134 (E-ISSN) 1932-5150 (P-ISSN) |
|---|---|
| Publisher: | SPIE |
| Entitled Authors: | Corresponding author |
| Subject: | Electrical Engineering, Electronics and Communications Engineering |
| Business Model: | hybrid OA |
| License: | CC BY |
| Homepage: | http://spie.org/x865.xml |
| Info Links: | Provider Information
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