Journal of Micro/Nanolithography, MEMS, and MOEMS

ISSN:1932-5134 (E-ISSN)
1932-5150 (P-ISSN)
Publisher:SPIE
Entitled Authors:Corresponding author
Subject:Electrical Engineering, Measurement and Control Technology
Business Model:hybrid OA
License:CC BY
Homepage:http://spie.org/x865.xml
Info Links:Provider Information