Journal of Vacuum Science and Technology A
| ISSN: | 1520-8559 (E-ISSN) 0734-2101 (P-ISSN) |
|---|---|
| Publisher: | American Institute of Physics (AIP) |
| Entitled Authors: | Submitting corresponding author |
| Subject: | Physics |
| Business Model: | hybrid OA |
| License: | CC BY |
| Homepage: | https://avs.scitation.org/journal/jva |
| Info Links: | MPDL Information
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